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Semiconductor Components (POLY IMIDE)Modify Date : 2018-11-21 09:26:51
▣ POLY IMIDE
※ feature of product
In lubrication-free, the PV limit is more than 10 times that of most high performance resins.
-Creep resistance: It does not soften even at high temperatures and withstands high loads.
-Chemical resistance: Grease resistant, oil solvent
-Release of gas in vacuum: High vacuum Torr
-Temperature
Continuous: 288 degrees Celsius, a short time: It is available at 480 degrees Celsius, cryogenic temperature,
Heat deformation: 360 ℃
-Combustion status: Non-combustible
-Typical Product Name: Vespel, Meldin, Plavis
※ Product
-Used in DRY ETCH process and CVD process.
Wafer Clamp Ring, Focus Ring, etc.
-LCD manufacturing equipment parts Lift pin, Glass pad
-Insulation and insulation parts, valve seats, thrust plugs
-Application parts under medium and high vacuum: bearings, gaskets, seals, pistons
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