압력센서 -가스용최종 수정 일자 : 2020-08-13 13:38:57

ㆍGTP Series
반도체용 압력센서

-사용용도

반도체 제조에 필요한 가스의 압력을 측정하는 정밀 압력센서로서 가스공급장치 및 반도체 생산장비 의 가스라인에 가스압력을 측정하는 압력센서 입니다.

-특징

외부 노이즈 대책에 우수

일본과 기업과 기술 제휴에 의한 국내생산실현

부암측정,절대압측정가능

전자화로에 의한 출력이 일정하여 센서의 호환성이 있으므로 보수가 용이

센서모듈은 초정밀 전자빔용접에 의한 밀폐구조로 센서정밀도가 우수.
 
ㆍSKPF Series
IGS용 압력센서

-적 용
• 반도체공정의 Integrated Gas System용 압력센서
• W-Seal, C-Seal 대응
• 1.5”, 1.125” 대응

특 징
• 전력공급 노이즈 억제
• CE/RoHs 인증
• 적은 압력손실과 빠른 반응시간
• 디스플레이 일체형으로 배관압력 확인

 
ㆍGTI7 Series
디지털 표시기 / 압력센서 콘트롤러 / 디지털표시 압력센서 일체형

적용
모든 종류의 기체들을 모니터링 할 수 있는 기술적 부분
특징
 Scaling 기능들 • 2개의 설정과 4개의 기능들을 가진 비교측정기 • 전력공급 노이즈 억제 • 단순한 키조작 • 손쉬운 Calibration 기능 • 자체적인 루프실험 기능 • CE/RoHs
 
ㆍGTI8 Series
IGS1.125 대응 디스플레이 일체형 센서

적용
반도체 공정용 가스압력의 모니터링

특징
• IGS 1.125”용의 Compact한 Size
• 2개의 설정과 4개의 기능들을 가진 비교측정기
• 전원공급 노이즈 억제
• 단순한 키조작
• 뛰어난 안정성
• 더욱 높아진 시인성
• CE/RoHs

 
ㆍHYP Series
Ultra High Purity Transmitter

-Application
Traditional solution based on VIM/VAR material field-proven over
years for monitoring any and all types of gases.
Best solution for monitoring Gas supply line.

Features & Benefits
 Guarantee high performance by adopting unique Load Conversion
technology
 Highest overpressure ratio tolerances on the market assure
no degradation in zero repeatability or performance
 Wetted surface provides superior corrosive gas and liquid compatibility
 Superior accuracy in lower pressure ranges vs competitive brands
 Wide pressure range
 Integrated display attachable
 CE Mark / RoHS compliant
 
ㆍNPS6220 Series
Ultra Compact Digital Indicator for Pressure Controller

-Application
Field-proven technology for monitoring any and all types of
gases

Features & Benefits
z Scaling functions
zComparator with 2 set points and 4 functions
zSmall size permits mounting on adjacent gas sticks
zPower supply noise protection
zSimple multi-function keypad operation
zBuilt-in loop-check function
z CE Mark / RoHS compliant
 
ㆍNPS6200 Series
Ultra Compact Digital Pressure Controller

 
ㆍIGS HYPF Series
Ultra High Purity Transmitter

Application
1.125” Surface mount pressure products
Best solution for monitoring Gas supply line for
semiconductor fabricating plants

Features & Benefits
 1.125” for C-Seal, W-Seal and any other types is available
 Designed to minimize pressure drop; ensure quick resilience
 Smallest analog pressure gauge in the world
 Optional LED miniature display for 4-20mA; smallest digital
monitoring display (red LED) utilizing 2-wire 4-20mA signal
as its power
 CE Mark / RoHS compliant

ㆍHYPF 6700 Series
IGS Digital Pressure Sensor

-Application
Innovative solution for monitoring any and all types of gases
Multifunctional pressure transducer with rotatable display unit

Features & Benefits
z Easy-to-See Dot matrix Display
z Display unit rotatable 270° for flexible use at selected angles
z Built-in Signal Output
z Built-in automatic Zeroing function
z Built-in comparator (Open Collector)
z Structural design instrumental to minimize pressure drop
 
ㆍHYPF 6801 Series
IGS Pressure Sensor with rotatable display

-Application
Innovative solution for monitoring Gas supply line
for semiconductor fabricating plants
Features & Benefits
 1.125” for C-Seal, W-Seal and any other types is available
Display unit rotatable 90° for flexible use at selected angles
Designed to minimize pressure drop; ensure quick resilience
Easy-to-see Dot matrix Display
Built-in Signal output
Built-in Comparator (Open Collector)
Built-in Auto Zeroing function
CE Mark / RoHS compliant
 
ㆍHYW Series
Ultra High Purity Transmitter

Application
Cylinder Cabinet /Valve Manifold Box/Gas Panel/ Vaporizer

Features & Benefits
HASTELLOY diaphragm applied
ATF(Advanced Thick Film) Technology-a Proprietary
Temperature stability improvement by advanced technology
Compact design
Local Zero Adjustment
CE Mark / RoHS compliant

 
ㆍARH Series
Ultra High Purity Transmitter

-Application
Innovative solution focused on specific user needs:stable, resilient
and accurate operation, free from industrial constraints such as
corrosive gases monitoring or temperature variance.
Best solution for monitoring Gas supply line

Features & Benefits
HASTELLOY diaphragm applied
ATF(Advanced Thick Film) Technology-a Proprietary
Highest overpressure ratio tolerances on the market assure
no degradation in zero repeatability or performance
Superior accuracy in lower pressure ranges vs competitive brands
Replaceable electronics
CE Mark / RoHS compliant